Input power supply AC220V, 50Hz
Chamber material PP/Stainless steel (transparent acrylic upper cover)
Substrate size Diameter≤12 inches (~300mm)
Spin speed 0-5000rpm
Acceleration 100-5000rpm/s
Speed resolution 1rpm
Single step time 3000s
Operation method 7 inches HD LCD touch screen
Dispensing method Manual dispensing
Coating curve Each curve has 5 segments, can store 5 curves in total
Vacuum chuck Yes, include
Vacuum pump Oil-less pump
Pumping speed 50 L/min
Total weight ~40kg
Includes: vacumm pump