2” Steel Chuck with Vacuum Switch
2” or less wafers
Coaxial stage with 2”-2” linear back-lash free travel
Fine position at ~10 micron resolution
Quick motion at ~25 mm drive per revolution
Chuck theta at 15 degree backlash free
320mmWx320mmDx320mmH
15 kg with Digital Camera and 4 Positioners
Accommodates DC micropositioner x 6 or RF micropositioner x 4